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Organic polymeric antireflective coatings deposited by chemical vapor deposition
Click Here to Read MoreOrganic polymeric antireflective coatings deposited by chemical vapor deposition
Click Here to Read MorePhotosensitive, developer-soluble bottom anti-reflective coating material
Click Here to Read MoreDual-layer light-sensitive developer soluble bottom anti-reflective coatings for 193-nm lithography
Click Here to Read MoreNonpolymeric antireflection compositions containing adamantyl groups
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