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Alkaline-resistant negative photoresist for silicon wet-etch without silicon nitride
Click Here to Read MoreThermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive
Click Here to Read MoreHighly etch-resistant polymer block for use in block copolymers for directed self-assembly
Click Here to Read MoreMetal-oxide films from small molecules for lithographic applications
Click Here to Read MoreOn-track process for patterning hardmask by multiple dark field exposures
Click Here to Read MoreMethod of creating photolithographic structures with developer-trimmed hardmask
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