Dr. Terry Brewer’s discovery of anti-reflective coatings resulted in a revolution in the global microelectronics industry and ushered in today’s high-speed, lightweight electronic devices.
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Dual-layer light-sensitive developer soluble bottom anti-reflective coatings for 193-nm lithography
Click Here to Read MoreHighly crosslinked polymer dielectric films for improved capacitor performance
Click Here to Read MoreCyclic olefin polymer compositions and polysiloxane release layers for use in temporary wafer bonding processes
Click Here to Read MoreNon-covalently cross-linkable materials for photolithography processes
Click Here to Read MoreNonpolymeric antireflection compositions containing adamantyl groups
Click Here to Read MoreCVD-free, scalable processes for the production of silicon micro- and nanostructures
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