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Wet developable hard mask in conjunction with thin photoresist for microphotolithography
Click Here to Read MoreThermal- and chemical-resistant acid protection coating material and spin-on thermoplastic adhesive
Click Here to Read MoreHighly etch-resistant polymer block for use in block copolymers for directed self-assembly
Click Here to Read MoreSpin-on protective coatings for wet-etch processing of microelectronic substrates
Click Here to Read MoreSpin-on protective coatings for wet-etch processing of microelectronic substrates
Click Here to Read MoreAlkaline-resistant negative photoresist for silicon wet-etch without silicon nitride
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